VSEA

Owners

Goods & Services

Semiconductor manufacturing equipment, namely, cluster tools and sputtering devices; wafer cooling system comprised of a wafer platen, monitor and controller for use with ion implantation systems; ion accelerators; electron beam accelerators; and target chambers; sputter coating guns for use in coating substrates; leak detectors; automatic vacuum locks for introduction and removal of semiconductor wafers from semiconductor processing equipment; computer programs used for maintaining, troubleshooting, and repairing accelerators

Semiconductor manufacturing machines, logic chip manufacturing machines and memory chip manufacturing machines, namely, large volume end stations comprised of tandem accelerators, cryopumps, and ion source, dual vaporizers and three-access electrode manipulators; machines for implanting ions in semiconductor wafers; vacuum pumps of the turbo molecular type used for obtaining clean, high vacuum environments in such applications as analytical instrumentation, semiconductor production, high energy physics, electron devices and materials research; [ physical vapor deposition machines; ] and complete ion implantation machines comprised of ion sources, ion accelerators and scanners, processing chambers, vacuum systems, power supplies and controls, ion sources

Technical consultation and testing in the field of semiconductor equipment