U.S. federal trademark · Serial No. 73369093 · Reg. No. 1262263
Automated Single Wafer Sputtering Apparatus, Comprising: Magnetron Cathode for Depositing Films, Film Deposition Chamber, Low Pressure Pumps, Radiant Heat Lamps and Wafer Transport Mechanism
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.