Wafer edge bevel inspection system for semiconductor wafers comprising a microscope, image processor, LED illumination systems for camera and image processor comprising light emitting diodes (LEDs), mirrors, lenses, and CCD cameras, electric display panel, HEPA filter, wafer loader, blank wafer, and host personal computer, all sold as a unit

'bevel':3 'blank':39 'camera':18,31 'ccd':30 'compris':9,22 'comput':44 'diod':25 'display':33 'edg':2 'electr':32 'emit':24 'filter':36 'hepa':35 'host':42 'illumin':15 'imag':12,20 'inspect':4 'led':14,26 'lens':28 'light':23 'loader':38 'microscop':11 'mirror':27 'panel':34 'person':43 'processor':13,21 'semiconductor':7 'sold':46 'system':5,16 'unit':49 'wafer':1,8,37,40

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