WETTEMP

Owners

Goods & Services

Apparatus and instruments for wafer processing chambers, namely, semiconductor wafer temperature sensors, environmental monitoring sensors that measure pressure, humidity, and temperature, in situ wafer processing measurement systems, wafer temperature monitoring devices for wet chemical processes; Diagnostic equipment for research laboratory use, namely, semiconductor process qualification systems comprising chamber temperature analyzers, chamber pressure analyzers, chamber humidity analyzers, and in situ process metrology instruments, controlled experiment apparatus for wafer processing tools in the nature of calibrated test wafers, thermal calibration fixtures, sensor calibration modules, and experimental chamber monitoring rigs; environmental data acquisition systems, namely, data processing apparatus for wafer temperature and chamber condition analysis, modeling, and process optimization; Electronic sensors for measuring temperature and environmental conditions, namely, pressure, humidity, and temperature; Recorded computer software for semiconductor wafer process monitoring and analysis; Downloadable computer software applications for semiconductor wafer process monitoring and analysis