Semiconductor manufacturing machines; Machines for microfabricated devices, semiconductor devices and MEMS devices, namely, etching machines and semiconductor wafer processing machines, and parts therefor; Etching equipment, namely, etching machines for microfabricated devices, semiconductor devices, and MEMS devices

'devic':7,9,12,31,33,36 'equip':25 'etch':14,24,27 'machin':3,4,15,20,28 'manufactur':2 'mem':11,35 'microfabr':6,30 'name':13,26 'part':22 'process':19 'semiconductor':1,8,17,32 'therefor':23 'wafer':18

Installation, upgrading, rebuilding, repair and maintenance of micro electromechanical systems, semiconductor, and/or microfabrication related apparatus and equipment, etching apparatus and equipment; Etching services for microfabricated devices, semiconductor devices and MEMS devices

'and/or':12 'apparatus':15,19 'devic':26,28,31 'electromechan':9 'equip':17,21 'etch':18,22 'instal':1 'mainten':6 'mem':30 'micro':8 'microfabr':13,25 'rebuild':3 'relat':14 'repair':4 'semiconductor':11,27 'servic':23 'system':10 'upgrad':2

XACTIX

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