Metal containers, and metal containers utilizing internal heat transfer components, for storage of chemical source materials and delivery of vapor-phase material therefrom for use in cleaning of semiconductor manufacturing equipment

'chemic':14 'clean':28 'compon':10 'contain':2,5 'deliveri':18 'equip':32 'heat':8 'intern':7 'manufactur':31 'materi':16,23 'metal':1,4 'phase':22 'semiconductor':30 'sourc':15 'storag':12 'therefrom':24 'transfer':9 'use':26 'util':6 'vapor':21 'vapor-phas':20

Chemical cleaners for use in cleaning of semiconductor manufacturing equipment

'chemic':1 'clean':6 'cleaner':2 'equip':10 'manufactur':9 'semiconductor':8 'use':4

XE-CLEAN

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