Coating plants, namely, physical vapor deposition (PVD) machines for industrial coating applications and parts thereof, and vacuum coating machines for applying thin films to substrates; evaporator unit for coating plants, namely, cathodic arc evaporation machines for vacuum deposition processes and cathodic arc evaporation apparatus as part of a physical vapor deposition (PVD) machine for industrial coating applications.

'apparatus':44 'appli':21 'applic':12,57 'arc':33,42 'cathod':32,41 'coat':1,11,18,29,56 'deposit':6,38,51 'evapor':26,34,43 'film':23 'industri':10,55 'machin':8,19,35,53 'name':3,31 'part':14,46 'physic':4,49 'plant':2,30 'process':39 'pvd':7,52 'substrat':25 'thereof':15 'thin':22 'unit':27 'vacuum':17,37 'vapor':5,50

Metals and metal alloys; plating compositions composed of metals; alloys of common metal; cermets; metal sputtering targets; thin layers of metals and ceramic materials, namely metal nitrides, metal carbides and metal carbo-nitrides, in particular deposited by coating processes.

'alloy':4,10 'carbid':29 'carbo':33 'carbo-nitrid':32 'ceram':23 'cermet':14 'coat':39 'common':12 'compos':7 'composit':6 'deposit':37 'layer':19 'materi':24 'metal':1,3,9,13,15,21,26,28,31 'name':25 'nitrid':27,34 'particular':36 'plate':5 'process':40 'sputter':16 'target':17 'thin':18

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