MICROMACHINED DEVICES FOR MICRO-POSITIONING, LIGHT BEAM SCANNING AND POINTING IN IMAGE PROCESSING EQUIPMENT, DOCUMENT SCANNERS, LASER PRINTERS, FINGERPRINT SCANNERS, LASER PROCESSING EQUIPMENT, AND LIGHT BEAM SWITCHES; ALSO USED FOR METROLOGY IN POSITION- MEASURING EQUIPMENT, 3D-MEASUREMENT EQUIPMENT, ENVIRONMENTAL SENSING EQUIPMENT, SPECTRUM ANALYZERS, GYROSCOPES, PROFILOMETERS, ATOMIC FORCE MICROSCOPES, FIELD EMISSION MICROSCOPES, AND FLUID FLOW METERS

'3d':38 '3d-measurement':37 'also':29 'analyz':45 'atom':48 'beam':8,27 'devic':2 'document':16 'emiss':52 'environment':41 'equip':15,24,36,40,43 'field':51 'fingerprint':20 'flow':56 'fluid':55 'forc':49 'gyroscop':46 'imag':13 'laser':18,22 'light':7,26 'measur':35,39 'meter':57 'metrolog':32 'micro':5 'micro-posit':4 'micromachin':1 'microscop':50,53 'point':11 'posit':6,34 'printer':19 'process':14,23 'profilomet':47 'scan':9 'scanner':17,21 'sens':42 'spectrum':44 'switch':28 'use':30

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