Electronic, electrical and optical apparatus, namely, lithography scanners and sensors, and matching computer operating systems software for alignment optimization in lithographic processes

'align':18 'apparatus':5 'comput':13 'electr':2 'electron':1 'lithograph':21 'lithographi':7 'match':12 'name':6 'oper':14 'optic':4 'optim':19 'process':22 'scanner':8 'sensor':10 'softwar':16 'system':15

Machines and machine replacement and structural parts for lithographic process control purposes, namely, steppers and scanners for manufacturing semiconductor chips

'chip':20 'control':11 'lithograph':9 'machin':1,3 'manufactur':18 'name':13 'part':7 'process':10 'purpos':12 'replac':4 'scanner':16 'semiconductor':19 'stepper':14 'structur':6

Technical and consulting services provided by technical specialists in the area of lithographic process control

'area':11 'consult':3 'control':15 'lithograph':13 'process':14 'provid':5 'servic':4 'specialist':8 'technic':1,7

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