halocarbon compounds in the nature of liquid or gas form used as an etching agent, drying agent, solvent, and/or foaming agent for use in the semiconductor, electric, electronic, precision machine, optical instruments and their parts, film, hard disk, textile, medical equipment, office equipment, optical instrument, optical disk, and heat insulating material industries

'agent':15,17,21 'and/or':19 'compound':2 'disk':38,47 'dri':16 'electr':27 'electron':28 'equip':41,43 'etch':14 'film':36 'foam':20 'form':10 'gas':9 'halocarbon':1 'hard':37 'heat':49 'industri':52 'instrument':32,45 'insul':50 'liquid':7 'machin':30 'materi':51 'medic':40 'natur':5 'offic':42 'optic':31,44,46 'part':35 'precis':29 'semiconductor':26 'solvent':18 'textil':39 'use':11,23

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