Semiconductor manufacturing equipment, namely, machines for heating semiconductor wafers; wafer processing equipment, namely, thermal processing tools and heat treatment apparatuses for semiconductor wafers

'apparatus':20 'equip':3,12 'heat':7,18 'machin':5 'manufactur':2 'name':4,13 'process':11,15 'semiconductor':1,8,22 'thermal':14 'tool':16 'treatment':19 'wafer':9,10,23

Recorded computer software for controlling, monitoring, and managing wafer heating and thermal processing operations in semiconductor fabrication; temperature control systems comprised of recorded software for controlling temperature for use in semiconductor manufacturing

'compris':21 'comput':2 'control':5,19,26 'fabric':17 'heat':10 'manag':8 'manufactur':32 'monitor':6 'oper':14 'process':13 'record':1,23 'semiconductor':16,31 'softwar':3,24 'system':20 'temperatur':18,27 'thermal':12 'use':29 'wafer':9

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